We help you meet the specific needs of EUV lithography.
B-Cool Eltec 502
Outgassing cube produced in our technology center. For the development of safe and reliable products and processes. – Andreas Neumann, Segment Manager Electronics, Blaser Swisslube AG
Meets the requirements of quality control and production
Fulfilled cleanliness requirements
- Excellent aluminum compatibility – even with sensitive alloys such as Al 5083
- Formulation without critical HIO elements such as P, Si, Sn and Zn
- Low mineral oil content helps fulfill RGA specifications
Satisfied machine operators
- Optimal machine compatibility
- Clean parts and machines thanks to excellent rinsing behavior
- Suitable for both soft and hard water
Specially developed formulation for machining workpieces for EUV lithography
Surface: spotless even with sensitive aluminum alloys
Outgassing: helps fulfill RGA specifications
XPS: no critical HIO elements
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